Fundamentals of semiconductor fabrication / (Record no. 5502)

000 -LEADER
fixed length control field 02153cam a22003857a 4500
001 - CONTROL NUMBER
EWU control number 5502
003 - CONTROL NUMBER IDENTIFIER
control field BD-DhEWU
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20190613020002.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 070530s2004 nyua g b 001 0 eng d
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER
LC control number 2003276248
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 981253072X
International Standard Book Number 0471232793
International Standard Book Number 9780471232797
035 ## - SYSTEM CONTROL NUMBER
OCLC control number (OCoLC)52333554
040 ## - CATALOGING SOURCE
Original cataloging agency UKM
Transcribing agency UKM
Modifying agency HKP
-- FUG
-- DLC
-- BD-DhEWU
Language of cataloging eng
041 ## - LANGUAGE CODE
Language code of text/sound track or separate title eng
050 00 - LIBRARY OF CONGRESS CALL NUMBER
Classification number TK7871.85
Item number .M378 2004
082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.38152
DDC edition 22
Author mark and Year MAF 2004
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name May, Gary S.
9 (RLIN) 9552
245 10 - TITLE STATEMENT
Title Fundamentals of semiconductor fabrication /
Statement of responsibility, etc Gary S. May, Simon M. Sze.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc New York :
Name of publisher, distributor, etc John Wiley & Sons,
Date of publication, distribution, etc c2004.
300 ## - PHYSICAL DESCRIPTION
Extent xiii, 305 p. :
Other physical details ill. ;
Dimensions 26 cm.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc Includes bibliographical references and index.
505 ## - FORMATTED CONTENTS NOTE
Title Table of contents
Contents note 1. Introduction --<br/>2. Crystal growth --<br/>3. Silicon oxidation --<br/>4. Photolithography --<br/>5. Etching --<br/>6. Diffusion --<br/>7. Ion implantation --<br/>8. Film deposition --<br/>9. Process integration --<br/>10. IC manufacturing --<br/>11. Future trends and challenges --<br/>Appendixes: --<br/>A. List of symbols --<br/>B. International system of units (SI units) --<br/>C. Unit prefixes --<br/>D. Greek alphabet --<br/>E. Physical constants --<br/>F. Properties of Si and GaAs at 300K --<br/>G. Some properties of the error function --<br/>H. Basic kinetic theory of gases --<br/>I. SUPREM commands --<br/>J. Running PROLITH --<br/>K. Percentage points of the t distribution --<br/>L. Percentage points of the F distribution.
520 ## - SUMMARY, ETC.
Summary, etc Summary:<br/>From crystal growth to integrated devices and circuits, this new book offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical Read more...<br/>
526 ## - STUDY PROGRAM INFORMATION NOTE
Program name Electrical & Electronic Engineering
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name Semiconductors
General subdivision Design and construction.
9 (RLIN) 745
Topical term or geographic name Integrated circuits
General subdivision Design and construction.
9 (RLIN) 9517
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Sze, Simon M.,
Dates associated with a name 1936-
9 (RLIN) 9553
856 42 - ELECTRONIC LOCATION AND ACCESS
Materials Specified WorldCat details
Uniform Resource Identifier http://www.worldcat.org/title/fundamentals-of-semiconductor-fabrication/oclc/52333554&referer=brief_results
Materials Specified Ebook Fulltext
Uniform Resource Identifier http://lib.ewubd.edu/ebook/5502
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Source of classification or shelving scheme
Koha item type Text
Koha issues (borrowed), all copies 35
Holdings
Lost status Source of classification or shelving scheme Not for loan Collection code Permanent Location Current Location Shelving location Date of accession Source of acquisition Cost, normal purchase price Total Checkouts Full call number Barcode Date last seen Date checked out Copy number Koha item type Total Renewals Price effective from
      Non-fiction EWU Library EWU Library Circulation Section 2007-05-30 Karim International 306.00 10 621.38152 MAF 2004 20389 2019-08-20 2019-08-05 C-3 Text    
      Non-fiction EWU Library EWU Library Circulation Section 2007-05-30 Karim International 306.00 14 621.38152 MAF 2004 20390 2019-08-21 2019-08-18 C-4 Text    
      Non-fiction EWU Library EWU Library Circulation Section 2007-05-30 Karim International 306.00 16 621.38152 MAF 2004 20391 2019-08-27 2019-08-21 C-5 Text 4  
    Not For Loan Non-fiction EWU Library EWU Library Reserve Section 2007-05-30 Karim International 306.00   621.38152 MAF 2004 20387     C-1 Text    
      Non-fiction EWU Library EWU Library Circulation Section 2007-05-30 Karim International 306.00 10 621.38152 MAF 2004 20388 2019-08-21 2019-08-18 C-2 Text 1  
      Non-fiction EWU Library EWU Library E-book 2018-02-07       621.38152 MAF 2004   2018-02-07     E-Book   2018-02-07

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