MEMS and microsystems : design and manufacture / Tai-Ran Hsu.

By: Hsu, Tai-Ran Material type: Text

TextLanguage: English Publication details: Boston ; New Delhi : McGraw-Hill, Tata McGraw-Hill, c2002. Description: xii, 436 p. : ill. ; 24 cmISBN: 0072393912 (alk. paper); 007048709X; 9780072393910 Subject(s): Microelectronics | Microelectromechanical systems | Microelectronic packagingDDC classification: 621.381 LOC classification: TK7874 | .H794 2002Online resources: WorldCat details

Contents:

TOC Ch. 1. Overview of MEMS and Microsystems -- Ch. 2. Working Principles of Microsystems -- Ch. 3. Engineering Science for Microsystem Design and Fabrication -- Ch. 4. Engineering Mechanics for Microsystems Design -- Ch. 5. Thermofluid Engineering and Microsystem Design -- Ch. 6. Scaling Laws in Miniaturization -- Ch. 7. Materials for MEMS and Microsystems -- Ch. 8. Microsystem Fabrication Processes -- Ch. 9. Overview of Micromanufacturing -- Ch. 10. Microsystems Design -- Ch. 11. Microsystem Packaging.

Summary: Summary: Provides a comprehensive overview of MEMS and microsystems for engineering students. This book presents background information needed to understand microtechnologies, including solid mechanics, Read more...

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Holdings
Item type	Current library	Collection	Call number	Copy number	Status	Barcode
Text	EWU Library Reserve Section	Non-fiction	621.381 HSM 2002 (Browse shelf(Opens below))	C-1	Not For Loan	17082
Text	EWU Library Reserve Section	Non-fiction	621.381 HSM 2002 (Browse shelf(Opens below))	C-2	Not For Loan	17083
Text	EWU Library Circulation Section	Non-fiction	621.381 HSM 2002 (Browse shelf(Opens below))	C-3	Available	17084

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Online version:
Hsu, Tai-Ran.
MEMS and microsystems.
Boston : McGraw-Hill, c2002
(OCoLC)606625978

Includes bibliographical references (p. 427-431) and index.

TOC Ch. 1. Overview of MEMS and Microsystems --
Ch. 2. Working Principles of Microsystems --
Ch. 3. Engineering Science for Microsystem Design and Fabrication --
Ch. 4. Engineering Mechanics for Microsystems Design --
Ch. 5. Thermofluid Engineering and Microsystem Design --
Ch. 6. Scaling Laws in Miniaturization --
Ch. 7. Materials for MEMS and Microsystems --
Ch. 8. Microsystem Fabrication Processes --
Ch. 9. Overview of Micromanufacturing --
Ch. 10. Microsystems Design --
Ch. 11. Microsystem Packaging.

Summary:
Provides a comprehensive overview of MEMS and microsystems for engineering students. This book presents background information needed to understand microtechnologies, including solid mechanics, Read more...

EEE

Saifun Momota

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